Micro-electromechanical systems (MEMS)
MOEMS Micro Optical Electronic Machines
Basic
Terminology
Companies Links
Picture an incredibly tiny machine so small that
it is not visible to the human eye. Imagine machines no bigger than a
grain of sand. Imagine hundreds of these machines aligned on a single
silicon chip. . Imagine a world where gravity and inertia carry no
importance, only atomic forces and surface structures dominate. A
silicon chip with hundreds or thousands of microscopic mirrors adjusting
in unison, enabling the all optical network and removing the bottlenecks
from the global telecommunications infrastructure. Imagine how different
the world would be if miniaturized sensors, and computers could be
embedded within materials, coated on surfaces, and spread throughout the
environment, essentially making matter programmable You are imagining
the microdomain, dominated by an incredible technology known as MEMS.
A MEMS device contains micro-circuitry on a tiny
silicon chip into which a mechanical device such as a mirror or a sensor
has been installeded. Potentially, such chips can be built in
large quantities at low cost, making them cost-effective for numerous
applications.
It is a technology that
integrates complex electromechanical elements and processing circuitry
on a chip, using a combination of fabrication techniques that
handles the electronics, similar to the way integrated circuits are
made, and processes called “micromachining,” . The end result is a
unique and self-contained system that not only detects its environment
but also has the capability of actively changing it. For this reason
MEMS is also sometimes referred to as SMART
MATTER.
Among the presently available uses of MEMS or those under study are:
Global position system sensors that can be included with courier parcels
for continual tracking
Sensors built into the fabric of an airplane wing so that it can sense
and react to air flow
Optical switching devices that can switch light signals over different
paths at 20-nanosecond switching speeds
Sensor-driven heating and cooling systems that would improve energy
savings
Basic Definitions/Terminology
Lab on a Chip technology is of interest in many areas. This
technology can be utilized to synthesize chemicals efficiently and cost
effectively as well as to carry out biological /clinical analyses, to
perform combinatorial chemistry, all on a single, miniaturized device.
Micromaching is basically a self explanatory term. Referring
to maching and fabrication at the micro & Nano levels.
Plasma Etching A process utilized in micromachining
Microfluidics a multidisciplinary field comprising physics,
chemistry, engineering and biotechnology that studies the behavior of
fluids at the microscale and mesoscale. Fluids at volumes thousands of
times smaller than a single drop . In addition it concerns the design of
systems in which such small volumes of fluids will be used.
Fluid behavior at the micro/nano scale differs from the behavior the we
normally obeserve in "macrofluids" Factors such as electrokinetics,
surface tension, energy dissipation, begin to dominate reactons.
Microfluidics is used in in micro-thermal and micro-propulsion
technologies and gene chip technology.
Optical Switches optical switches are an
opto-mechanical switch matrix system.
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Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering
Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings
Microsystem Engineering of Lab-on-a-Chip Devices
Get Top Investing Tips for Download at Audible.com.
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Advanced Micro Sensors Thin Film manufacturing solutions
related to MEMS/MOEMS, sensors and data recording products
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Advanced Optical MEMS, Inc {TransOptix}
optical
switches
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Advanced Custom Sensors Inc.
Supplier
of thin-film and micromachined force and pressure sensors to the
medical, chemical, oil, and gas industries. Services include strain
gauge installation, MEMS packaging, and sensor module design and
manufacturing.
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Advent Optronics
optical MEMS Test
systems
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Agilent Technologies Lab on a Chip technology & Support are
one of this companies many facets
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Alcatel Micro Machining Systems Division of
ALCATEL VACUUM
TECHNOLOGY developing, manufacturing, and marketing Deep Plasma
Etching System equiped with a ICP (Inductively Coupled Plasma)
reactor and capable to process wafers up to 8" size
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Akustica
designs mems based
sound solutions that improve the way sound is captured
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Amkor Technology world's leader in micro
electronic packaging technologies and the world's largest outsource
provider of Micro-Electronic Machines (MEMs) and Micro Optical
Electronic Machines (MOEMs).
NasdaqNM:AMKR
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Analog
Devices pioneer in
the micromachined IC industry, Analog Devices sampled the first
fully-integrated, single chip MEMS-based accelerometers
NYSE:ADI
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Applied MEMS Inc. Subsidiary of
Input/Output Inc.
mems
based products and services. Applied MEMS currently offers micro-g
accelerometers for various seismic, strong motion, test/vibration
measurement and control, and inertial guidance applications. Also
offers a family of micro-mirror technologies suitable for beam
positioning
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Bartels
Mikrotechnik Production of microstructures utilizing different
microstructure technologies.
Benchmark Technologies supplier of reticles (photomasks)
for the semiconductor, MEMS, and photonics industries .
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BlueBird Optical
MEMS Ltd. - Manufacturer of optical MEMS and fiber optic
devices.
- Blu-Si, Inc. - Silicon
micromachining, microfabrication company providing custom product
development and process development for the microtechnology market:
MEMS, MOEMS, and BioMEMS.
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Boston
Micromachines Corporation - Supplies and develops optical and
fluidic devices for biomedical, telecommunication, and gas flow
control systems. Includes product information, relevant publications
and contact details.
- Boxin Optical
Instrument Co. " Now
China has entered WTO, we also want to enlarge the sales of
overseas, we are very glad to cooperate sincerely with all agents,
we guarantee the high quality products, very low price, most quickly
delivery and perfect service.What we promises is : what we do is to
meet what you need. "
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bsac
optical test facilities available for MEMS
characterization. {National Science Foundation
Industry/University Cooperative Research Center }
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Caliper Life Sciences Leader in
Lab on a Chip technologies
NasdaqNM:CALP
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CardioMems Inc. Microelectromechanical
Systems technology to create breakthrough devices for the
diagnosis, treatment and management of disease.
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Coventor - RF MEMS,
optical MEMS, microfluidics - software, design, and manufacturing
support.
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CSEM: Swiss Center for Electronics
and Microtechnology - Provider of customized microsystems,
microelectronics design, and specialized coatings. Can provide
biochemical, magnetic, microfluidic, microrobotic, and optical
technologies and consulting.
- C2V Designer and manufacturer of MEMS and professional design &
simulation software for integrated optics. Not Publicly
Traded
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D4 Technology Ltd
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Consultants offering services from feasibility studies to sensor
design to manufacturing.
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Emag Technologies Inc. Designs
and fabricates a variety of three-dimensional structures on high
resistivity silicon wafers. Wet anisotropic etching and dry DRIE
etching can be utilized to form highly compact multilevel
interconnects for developing small light-weight wafer scale systems.
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Etec Inc., Automated mems
testing systems
- EV
Group Designs and manufactures
multi-functional processing equipment for the MEMS and semiconductor
markets including the latest mask aligner, wafer bonder, resist
coater, cleaning and developing technology.
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FEI
Company microstereolithography for silicon MEMS.
NasdaqNM:FEIC
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Honeywell - MEMS Services
- Offers MEMS services from single process steps to full product
development, from design concept through volume production, test and
packaging.
- htmicro - Uses a LIGA-like
technology for precision manufacturing of microfluidic and
micromechanical devices.
- Innovative Micro Technology (IMT)
- IMT offers strategic partnership, providing 6 inch MEMS wafer
fabrication service with experience and resource for design,
prototyping, process development, and high volume manufacturing.
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Integrated Micromachines
- Design, analysis, and fabrication facilities. Current products
include MEMS-based optical switches.
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IntelliSense
- Design and fabrication of MEMS for the telecommunication, life
science and microinstrumentation industries. Supplier of CAD tools,
product development, and manufacturing.
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Irvine Sensors Susidiary Micro Sensors Inc. designing,
developing and producing micromachined sensors and sensor readout
circuits for MEMS applications. inventor
of three-dimensional (3D) semiconductors
NasdaqSC:IRSN
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Jobst Technologies
Biosensors ,Microsystems ,chemical Sensors
- J.P. Sercel Associates -
Provides excimer laser services and industrial ultraviolet laser
technology for microfabrication.
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Kionix
Products such as inertial sensors, microswitches,
microfluidic systems, micromirror arrays and ultra-high density data
storage devices. MEMS based products being evaluated and applied in
industry sectors as diverse as automotive, consumer products, data
storage, and biotechnology.
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Lamerholm Electronics Ltd
Manufacturer of sensors. Product
line includes micro-machined silicon accelerometers designed for DC
applications.
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Lightconnect Designs and manufactures MEMS
components for next generation, dynamically configurable optical
networks. Private equity funded.
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MEMS Design and Product
Realization - Start-up company dedicated to bringing MEMS
commercial devices to market. Useful reference material and image
and movie galleries.
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MEMSCAP - provider of
semiconductor Intellectual Property solutions for high performance
integrated designs incorporating Micro Electro Mechanical Systems
technology.
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MEMS Optical Inc.
a leading supplier and manufacturer
of both refractive (microlens arrays) and diffractive
(beam shapers, beam splitters, etc.) micro optics and of
MEMS devices such as scanning tilt micro mirrors and
deformable mirrors. Not Publicly Traded
- MEMSTECH
Independent Asian MEMS Foundry
and Packaging company that offers MEMS wafer fabrication technology
platforms and process technology
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Merit Sensor Systems
{Formerly Sentir} manufactures state-of-the-art
silicon micromachined sensors for OEM measurement and control
applications. These sensors include piezoresistive pressure sensor
integrated circuits, custom micromachined microstructures, and
ceramic hybrid pressure sensor assemblies.
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MicroFluidics
a division of MFIC
Corporation, pioneered the Microfluidizer® Material
Processors
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Microsaic Systems Ltd They claim
their scanner technology is smaller and tougher than mirror based
laser scanners. Microsiac’s technology integrates optics with robust
cantilevers to produce a tough laser scanner on a silicon chip that
is extremely thin and flexible.
- MEMX Inc.
Broad-based MEMS company pursuing a variety of commercial and
government products. Focuses on design, fabrication, packaging, test
and qualification of MEMS-based devices.
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microFAB Bremen GmbH
-
Offers services and manufacturing capacities for the production of
microsystems and MEMS, such as sensors and actuators
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Micralyne
Inc.
Is a
manufacturer of microfabricated and MEMS-based products for leading
instrumentation companies worldwide.
Micralyne's
MEMS solutions include sensors, lab-on-a-chip devices, and optical
switch systems,
one of the few
profitable MEMS companies operating in the world today
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MicroElectroMechanical Systems Developing and providing
domestic industry with MEMS test structures, test methods,
measurement standards, and standard manufacturing practices
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Micronics
- Specializing
in fluid miniaturization solutions that integrate and automate
laboratory processes on a disposable lab chip.
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MicroSurfaces, Inc. -
MSI provides surface coating technology to overcome stiction problem
in MEMS industry. MSI also provides functional glass slides to
biotechnology industry.
- Microvision
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Nano Chip Inc.
design of MEMS silicon memory. Nanochip
devices feature compact flash compatible interfaces in
single and multiple gigabyte memory.
Investor inquiries gknight@nanochip.com
- NanoGen
Core technology is their NanoChip® Electronic
Microarray. A "Lab on a chip" system for identification and analysis
of biological molecules, including DNA and RNA,
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NanoMEMS Research, LLC
- Radio-frequency MEMS and nanotechnology research, consulting and
education.
- Neolytics Inc. -
Neolytics is an innovative microsystem Design, Consulting &
Technology solutions provider.
- Nano Structures Inc. Custom Fabrication of Thin Film and
mems
Micro machined Devices.
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Nantero Corp. Nantero is developing NRAM™, a high-density
nonvolatile random access memory chip, using nanotechnology. The
company's objective is to deliver a product that will replace all
existing forms of memory, such as DRAM, SRAM and flash memory, with
NRAM serving as universal memory.
Venture Capital
Funding
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Onix Micro Systems
designs, develops and supplies mems -based all-optical switching
engines for telecommunications equipment suppliers .
venture capital
Funding
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Norsam Technologies Nano technology solutions. We
offer development, prototyping and manufacturing of MEMS &
micromachining devices and systems based on surface, bulk and/or
focused ion beam micromachining processes. Financed
through private investors
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PHS MEMS - Develops and
produces passive radio-frequency and optical devices with MEMS
technology for communication markets. A private equity start-up
Company
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Protron Mikrotechnik
develops MEMS. expertise
in particular in microfluidics and fiber-optics, outstanding
development service. After successfull prototyping, they provide a
customer specific manufacturing concept assistance.
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Schiller Engineering
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Design, analysis, and prototypes of MEMS devices, MEMS packaging,
and electro-optic packaging. Includes services and publications.
- Sci Wave Inc. Venture backed firm that
designs, manufactures, and delivers products and services based on
mems microfabrication, precision metrology and packaging technology.
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Sensant Corp Development of MEMS
capacitive microfabricated ultrasonic transducers (cMUT) for medical
imaging and medical device applications. Private equity funded.
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Silex MicroSystems AB Supplier of MEMS components to the
life science and telecommunications sectors
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Solarius Development Inc. {formerly NanoFocus Inc.} is a
global leader for non-contact surface measurement solutions.
Manufactures profilometers and confocal microscopes based on laser
and optical inspection technology for 3D non-contact surface
measurement.
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Sporian Technologies
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Provides MEMS (Microelectromechanical Systems) design and packaging
services.
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Surface
Technology Systems provider of specialist plasma etch
and deposition systems to customers in the MEMS, Optoelectronic,
Compound Semiconductor, Wafer Level Packaging and Thin Film Head
industries. STS is the market-leading supplier of deep silicon etch
technology for MEMS micromachining.
London Stock
Exchange:SRTS.L
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Suss
MicroTec Spin Coaters
and Probe Systems for the MEMS, advanced packaging and semiconductor
markets
Other
OTC:SESMF.PK
Munich:SMHG.MU
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Tanner Research
Electronic Design Automation (EDA)
software for ICs, multi-chip modules (MCMs) and
microelectromechanical systems (MEMS). Not Publicly Traded
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Tegal Corp. Manufacturer of plasma etch systems. systems
and process design to provide the semiconductor, telecommunications,
mems,
data storage, and related industries.
NasdaqSC:TGAL
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TRONIC'S Microsystems SA
- Designs and manufactures customer-specific MEMS and Optical MEMS
components using both SOI surface micromachining and bulk
micromachining.
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Ultratech
Manufactures photolithography
steppers for the fabrication of semiconductors, thin film heads for
disk drives and micromachined components.
NasdaqNM:UTEK
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Umech
Technologies Provider of advanced MEMS motion analysis
instrumentation and services. The MEMS Motion Analyzer - Generation
2(MMA G2) provides real time 3D characterization of complex MEMS
motions. The MMA G2 also provides sophisticated interferometric
surface profiling of dynamic and static structures. Umech pioneered
advanced MEMS motion analysis
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Xactix - MEMS device and
equipment development and manufacturing company. Verimetra
subsidiary develops bioMEMS devices. >Investors<
- Xerox
Well known Multi National Conglomerate -Optical
MEMS Division
NYSE:XRX_pc
NYSE:XRX
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Yujin Robotics Company Optical MEMS
KOSDAQ:023410.KQ
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